MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis ElishaSacks

We have developed an interactive computer-aided design program that supports mechanical design of devices fabricated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation, and supports functional parametric design. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to detect and correct a design flaw in a micro-mechanical indexing mechanism fabricated at Sandia with the SUMMiT process.